The CVD system consists of a gas supply system, a dual temperature zone tube furnace, and an exhaust system, with a maximum temperature of 1200 degrees and 1400 degrees1600 degrees, 1700 degrees, heating range can be single temperature zone, double temperature zone, triple temperature zone, etc. The ultimate vacuum can reach 10-3Pa,The gas supply system can be flow regulated using proton flow meters or float flow meters. The number of mixing channels can be 2, 3, 4, or 5Mixed together.

This CVD system consists of an 8-channel gas supply system KTL1700-1700 dual temperature zone tube furnace and a vacuum system

KTL1700-1700 Dual Temperature Zone Tube Furnace: Using 1800 type silicon molybdenum rods and silicon carbon rods as heating elements, with two heating zones, using dualLayered shell structure and electronic control temperature instrument, each heating zone can perform 30 stages of programmed temperature control, phase shift triggering, thyristor control, furnaceThe chamber is made of alumina polycrystalline fiber material, and stainless steel flanges are installed at both ends of the furnace tube. The stainless steel flanges are equipped with air nozzles, valves, andPressure gauge, the vacuum degree can reach 10-3 Pa during vacuum pumping. The furnace is horizontal, and the two temperature zones can be independently controlled and set differentlyThe furnace has a balanced temperature field, low surface temperature, fast temperature rise and fall rate, and energy saving, making it easy to use and operateAdvantages: It is used by universities, research institutes, and industrial and mining enterprises for high-temperature atmosphere sintering, atmosphere reduction, CVD experiments, and vacuum annealingIdeal product.

(1) The hot end thickness D1 of silicon molybdenum rod is 7mm, which is commonly used by manufacturers as 6MM. The heating end is thick, not easy to bend, and the surface load of the rod is low, resulting in a long service life.

（2) It adopts hot bending technology, with uniform resistance and long service life

(3) The length of Lu's cold end is 210mm, The 400X300X300 furnace has a diameter of 260, and most manufacturers use 180mm. The cold end is long and the furnace top temperature is low

(4) The surface of the silicon molybdenum rod has a dense amorphous oxide film, which can effectively protect the silicon molybdenum rod.

When the circuit experiences overcurrent or leakage, the circuit will automatically disconnect

This atmosphere tube furnaceapproveEquipped with communication interfaces and software, the various parameters of the furnace can be directly controlled through a computer, and the PV and SV temperature values and instrument operation on the furnace can be observed from the computer. The actual heating curve of the furnace will be drawn in real time by the computer, and the temperature data at each moment can be saved and retrieved at any time

(1) High quality high-purity alumina polycrystalline fiber solidification furnace formed by vacuum suction filtration.

(2) Adopting Japanese technology for molding.

(3) The furnace material has low heat capacity and low thermal conductivity, resulting in less heat dissipation, good insulation, and high reflectivity. Temperature field equilibrium.

(4) The furnace alumina wire is thin and long, with high temperature resistance and strong resistance to thermal expansion and contraction

(5) The furnace surface is smooth and not prone to powder loss.

(All imported electrical appliances certified by UL)

1Phase shift trigger (with soft start and current limiting function)

2. Current limiting function: No matter how the heating rate is set, the secondary current of our electric furnace is always limited to within 170A, effectively protecting the equipment. Due to the use of current limiting function, the furnace door can be opened at high temperatures. If the electric furnace you are using needs to limit the heating rate of the furnace during the heating process (for example, it is specified that the heating rate should not exceed 1400 ℃)

If the temperature exceeds 3 ℃/min, non current limiting triggers are used. The heating rate is set incorrectly or the heating rate is too fast, and the current will be affected in this caseVery large, the equipment may trip or burn out.

3. Soft start function: When starting up, the current will gradually increase, which has less impact on the heating element and is beneficial for extending the life of the heating element

4. Protection function: If the current exceeds the limit current, the trigger will automatically cut off the triggering function to cut off the current protection of the electric furnace.

1. The transformer cable is made of pure copper

2. The sound of the transformer is low

3. Transformer body temperature is low